silicon gate self aligned junction isolated cmos
advanced polysilicon self aligned process
改进型自对准多晶硅栅工艺
微机械薄膜变形镜(MMDM)
Buried Metal Self-Aligned
Double polysilicon self-aligned
equi-planar and self-aligned technology
metal self aligned process
polysilicon self aligned process
self aligned integraed circuit
self aligned photoresist process